Element manufacturing method and element manufacturing apparatus

摘要

An element manufacturing method in which a section of a substrate that is irradiated with laser light can be covered efficiently. A plurality of protrusions of an intermediate product are lined up in a first direction on a substrate, and a sealing mechanism includes one pair of rollers that rotate around a rotational axis extending in a second direction orthogonal to the first direction. The paired rollers are lined up spacedly in the first direction. In a sealing step using the sealing mechanism, a section of a lid member that is being tensioned between the paired rollers is in close contact with a part of the intermediate product. In an irradiation step, light passes through the section of the lid member that is being tensioned between the paired rollers, and reaches the intermediate product.

主权项

1. An element manufacturing method for forming an element on a substrate, the method comprising the steps of:
providing an intermediate product including the substrate and a plurality of protrusions each disposed on the substrate; providing a lid member having a first surface and a second surface present at an opposite side with respect to the first surface, the lid member being provided so that the first surface orients toward the protrusions of the intermediate product; and sealing the intermediate product by pressing a part of the first surface of the lid member against a part of the intermediate product by use of a sealing mechanism abutting the second surface of the lid member, and thereby bringing the part of the intermediate product into close contact with the first surface of the lid member, wherein: the sealing mechanism includes one pair of tensioning members spacedly lined up; in the sealing step, a section of the lid member that is being tensioned between the paired tensioning members is in close contact with the part of the intermediate product; the element manufacturing method comprises an irradiation step in which a section of the lid member that is being tensioned between the paired tensioning members is irradiated with light; and in the irradiation step, the light passes through the section of the lid member that is being tensioned between the paired tensioning members, and reaches the intermediate product.