Surface positioning detecting apparatus, exposure apparatus and device manufacturing method

摘要

A surface position detecting apparatus includes a light projection system that projects a beam from an oblique direction onto a detection target surface, and a light reception system that receives a beam reflected on the detection target surface, said surface position detecting apparatus adapted to detect a surface position of the detection target surface based on an output from the light reception system. At least one of the light projection system and the light reception system includes a total reflection prism member including an internal reflection surface which totally reflects an incident beam. Upon detection of the surface position of the detection target surface, a refractive index of an optical material forming the total reflection prism member and an angle of incidence of the incident beam to the internal reflection surface of the total reflection prism member are set so as to satisfy a predetermined relation.

主权项

1. A position detecting apparatus which detects a position of a target surface in a direction crossing the target surface with a light beam which is projected onto the target surface from an oblique direction with respect to the target surface and is reflected on the target surface, the surface position detecting apparatus comprising;
a prism member arranged in an optical path of the light beam, the prism member having a first reflection surface and a second reflection surface, the first reflection surface performing a total reflection of the light beam within the prism member, the second reflection surface performing a total reflection of the light beam from the first reflection surface within the prism member, the first and second reflection surfaces being arranged so that the light beam from the second reflection surface and the light beam on an incidence side of the first reflection surface are non-crossing each other, wherein one of incidence angles of the light beam to the first and second reflection surfaces is smaller than the other of the incidence angles so that, with respect to a relative positional deviation caused by total reflection between a first polarization component and a second polarization component which have orthogonal polarization directions relative to each other and constitute the light beam, at least a part of a first relative positional deviation amount caused at the first reflection surface and a second relative positional deviation amount caused at the second reflection surface substantially cancel each other.