WAFER STORAGE AND TRANSPORT DEVICE

摘要

A wafer storage and transport device is adapted to store and transport a storage box. The wafer storage and transport device includes a housing, a rotary rack and a transport mechanism. The housing has a transport zone. The rotary rack is rotatable about an axis, and includes a plurality of angularly spaced-apart carrier seats that surround the axis. Each of the carrier seats is rotatable to correspond in position to the transport zone of the housing, and is adapted for the storage box to be disposed co-rotatably thereon. The transport mechanism is for transporting the storage box out of the housing when the storage box is rotated by the rotary rack to correspond in position to the transport zone of the housing.

主权项

1. A wafer storage and transport device adapted to store and transport at least one storage box that receives a plurality of wafers therein, the wafer storage and transport device comprising:
a housing having a transport zone; a rotary rack disposed in said housing, rotatable about an axis, and including a plurality of angularly spaced-apart carrier seats that surround the axis, each of said carrier seats being rotatable to correspond in position to said transport zone of said housing, and being adapted for the storage box to be disposed co-rotatably thereon.