Method for manufacturing assembly of flexible display device and assembly of flexible display device manufactured with same

摘要

The present invention provides a method for manufacturing an assembly of a flexible display device and an assembly of a flexible display device manufactured therewith. The method includes: (1) providing a flexible base (22); (2) forming a graphene layer (24) on the flexible base (22); (3) forming a protective layer (26) on the graphene layer (24); (4) forming a low-temperature polysilicon layer (28) on the protective layer (26). The method for manufacturing an assembly of a flexible display device and the assembly of the flexible display device manufactured therewith according to the present invention are such that the graphene layer is formed on the flexible base to effectively conduct out heat generated in the process of forming the low-temperature polysilicon layer so as to protect the flexible base from being affected by the heat without increasing the thickness of the protective layer thereby reducing internal stress and facilitating the realization of thinning.

主权项

1. A method for manufacturing an assembly of a flexible display device, comprising the following steps:
(1) providing a flexible base; (2) forming a thermal dissipation layer comprising a graphene layer on the flexible base; (3) forming a protective layer on the graphene layer, wherein the protective layer comprises a stack of a silicon nitride layer and a silicon oxide layer, and the silicon oxide layer has a thickness of 500 nm; and (4) forming an amorphous silicon layer on the protective layer and subjecting the amorphous silicon layer to annealing, doping, and laser activation so as to form a low-temperature polysilicon layer on the protective layer, wherein laser activation generates heat that is at least partly dissipated away through the thermal dissipation layer comprising the graphene layer.