OPEN-TYPE X-RAY TUBE COMPRISING FIELD EMISSION TYPE ELECTRON GUN AND X-RAY INSPECTION APPARATUS USING THE SAME

摘要

An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

主权项

1. An open-type X-ray tube comprising:
an electron gun chamber having a field-emission type electron gun for generating an electron beam; an electromagnetic lens section for focusing said electron beam; an electron beam aperture for narrowing said electron beam; an X-ray target to emit an X-ray with an irradiation of said electron beam narrowed by said electron beam aperture; a liner tube section connected to said electron gun chamber, said X-ray target being arranged in said liner tube section; and a vacuum pump for evacuating said electron gun chamber to an ultra-high vacuum and for keeping said ultra-high vacuum; wherein said electron gun chamber, said electron beam aperture, said X-ray target, said liner tube section and said vacuum pump constitute a vacuum tube section in one body with vacuum sealing by using a metal seal, and said vacuum tube section is attachable and detachable to said electromagnetic lens section.