Plasma ion source for use with a focused ion beam column with selectable ions

摘要

An inductively coupled plasma source having multiple gases in the plasma chamber provides multiple ion species to a focusing column. A mass filter allows for selection of a specific ion species and rapid changing from one species to another.

主权项

1. A charged particle beam system, comprising:
a plasma ion source; one or more gas sources for providing multiple gases to the plasma ion source to produce multiple ion species simultaneously from the plasma ion source, the gas sources including a source of at least one of following gases: helium, xenon, argon, hydrogen, neon, and oxygen; a mass filter to select an ion species from the multiple ion species produced by the plasma ion source; and focusing optics to produce a focused beam of the selected ion species at a target, the beam having a submicron diameter at the target.