发明名称 |
Semiconductor switch |
摘要 |
According to an embodiment, a semiconductor switch includes a first insulating film on a semiconductor substrate, a first semiconductor layer on the first insulating film, a semiconductor switch circuit on the first semiconductor layer, and a wiring on the first insulating film. The first insulating film being between the wiring and the substrate. The wiring connects the semiconductor switch circuit and a terminal. A polycrystalline semiconductor layer is between the wiring and the first insulating film. |
申请公布号 |
US9627208(B2) |
申请公布日期 |
2017.04.18 |
申请号 |
US201514842405 |
申请日期 |
2015.09.01 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Ishimaru Atsushi;Nagaoka Masami |
分类号 |
H03K17/16;H03K17/81;H01L23/62;H01L29/68;H01L21/263 |
主分类号 |
H03K17/16 |
代理机构 |
Patterson & Sheridan, LLP |
代理人 |
Patterson & Sheridan, LLP |
主权项 |
1. A semiconductor switch, comprising:
a first insulating film on a semiconductor substrate; a first semiconductor layer on the first insulating film; a semiconductor switch circuit on the first semiconductor layer; a wiring on the first insulating film, the first insulating film being between the wiring and the semiconductor substrate, the wiring connecting the semiconductor switch circuit and a first terminal; and a polycrystalline semiconductor layer between the wiring and the first insulating film and electrically isolated from the wiring. |
地址 |
Tokyo JP |