发明名称 Semiconductor switch
摘要 According to an embodiment, a semiconductor switch includes a first insulating film on a semiconductor substrate, a first semiconductor layer on the first insulating film, a semiconductor switch circuit on the first semiconductor layer, and a wiring on the first insulating film. The first insulating film being between the wiring and the substrate. The wiring connects the semiconductor switch circuit and a terminal. A polycrystalline semiconductor layer is between the wiring and the first insulating film.
申请公布号 US9627208(B2) 申请公布日期 2017.04.18
申请号 US201514842405 申请日期 2015.09.01
申请人 Kabushiki Kaisha Toshiba 发明人 Ishimaru Atsushi;Nagaoka Masami
分类号 H03K17/16;H03K17/81;H01L23/62;H01L29/68;H01L21/263 主分类号 H03K17/16
代理机构 Patterson & Sheridan, LLP 代理人 Patterson & Sheridan, LLP
主权项 1. A semiconductor switch, comprising: a first insulating film on a semiconductor substrate; a first semiconductor layer on the first insulating film; a semiconductor switch circuit on the first semiconductor layer; a wiring on the first insulating film, the first insulating film being between the wiring and the semiconductor substrate, the wiring connecting the semiconductor switch circuit and a first terminal; and a polycrystalline semiconductor layer between the wiring and the first insulating film and electrically isolated from the wiring.
地址 Tokyo JP