| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an MEMS switch in which a reduction of a transfer loss is attained and moreover a contact pressure is enlarged as well while isolation characteristics are improved. Ž<P>SOLUTION: The MEMS switch includes a pair of signal lines 34, 34 which are formed on one surface of a base board 1 in a thickness direction and one end portion becomes stationary contacts 25, 25, and a driving means for displacing a movable contact 25 in the thickness direction as a driving direction so that the movable contact 25 is inserted into a gap 36 between the one end portions of the pair of the signal lines 34, 34. In each of the stationary contacts 35, 35 and the movable contact 25, there are formed inclined surfaces 35a, 35a, 25a abutting with each other which incline against a horizontal surface crossing at right angles with a driving axis direction, and when the movable contact 25 is inserted into a gap 36, a continuous surface is formed in a transfer direction of a signal in a conductor portion composed of the one stationary contact 35, the movable contact 25 and the other stationary contact 35. The driving means is composed of a static electric actuator 5 and a piezo-electric actuator 4. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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