Ultra low power thermally-actuated oscillator and driving circuit thereof

摘要

An ultra low power thermally-actuated oscillator and driving circuit thereof are provided. The ultra low power thermally-actuated oscillator includes proof masses, thermally-actuated element and a plurality of driving elements. The proof masses is symmetrically disposed and suspended from a substrate by spring structure. The thermally-actuated element is a line structure to effectively reduce the motional impedance and direct current power. Wherein, the thermally-actuated element is connected to the proof masses or the spring structure. The plurality of driving elements are respectively disposed on both sides of the thermally-actuated element to provide a driving current. When the driving current flows through the thermally-actuated element, the thermally-actuated element will be deformed and thus the proof masses will be driven to produce a harmonic oscillation.

主权项

1. An ultra low power thermally-actuated oscillator, comprising:
at least one set of proof masses, symmetrically disposed and suspended from a substrate by at least one spring structure; at least one thermally-actuated element, being a line structure to enhance electrical impedance of the thermally-actuated oscillator and reduce thermal capacitance of the thermally-actuated oscillator, the at least one thermally-actuated element connected to the at least one set of proof masses; and a plurality of driving elements, respectively disposed on both sides of the at least one thermally-actuated element to provide a driving current, when the driving current flows through the at least one thermally-actuated element, the at least one thermally-actuated element will be deformed and thus the at least one set of proof masses will be driven to produce a harmonic oscillation; wherein a structural thickness of at least one line of the line structure is smaller than the thickness of the proof masses.