COORDINATE MEASURING MACHINE AND METHOD FOR OPERATING A COORDINATE MEASURING MACHINE

摘要

A coordinate measuring machine including a workpiece support for mounting a workpiece to be measured; a mechanism for moving a sensor in a first coordinate direction and a second coordinate direction perpendicular thereto. The mechanism includes: a first measurement slide guided in the first coordinate direction along two parallel guides arranged on opposite sides of the workpiece support. The first measurement slide spans the support. The first slide is driven via a first drive, which drives the first slide along a first guide of the guides, and is driven via a second drive, which drives the first slide along the second of the guides; a second measurement slide guided movably in the second coordinate direction along the first measurement slide. The second slide is assigned a position measuring system, via which the position of the second measurement slide relative to the first measurement slide can be determined; a controller, which actuates the first and second drive. The controller includes a force feedforward control, which, depending on the detected position (xactual) of the second measurement slide and depending on a setpoint acceleration (asetpoint) to be set of the first measurement slide, brings about an actuation of the first drive and/or of the second drive in such a way that the torques which as a result of the acceleration of the first measurement slide by the first drive and by the second drive relative to a rotation axis (Rz) which is perpendicular to the first and second coordinate directions at least partly or completely compensate for one another.

主权项

1. A coordinate measuring apparatus comprising
a workpiece support configured for mounting a workpiece to be measured; a sensor; a mechanism configured to move said sensor in at least a first coordinate direction (y) and a second coordinate direction (x) perpendicular to said first coordinate direction;
said mechanism for moving said sensor including
a first guide and a second guide arranged in parallel on opposite sides of said work piece support;a first measurement slide configured to be guided in said first coordinate direction (y) along said parallel first and second guides;said first measurement slide spanning said workpiece support;a first drive configured to drive said first measurement slide along said first guide;a second drive configured to drive said first measurement slide along said second guide;a second measurement slide configured to be guided movably in the second coordinate direction (x) along said first measurement slide;a positioning measuring system assigned to said second measurement slide and configured to determine a position (xactual) of said second measurement slide relative to said first measurement slide; a controller configured to actuate at least said first drive and said second drive; and,
said controller including a force feedforward control, which, depending on said determined position (xactual) of said second measurement slide and depending on a setpoint acceleration (asetpoint) to be set of said first measurement slide, is configured to cause an actuation of at least one of said first drive and said second drive in such a way that the torques which occur as a result of the acceleration of said first measurement slide by said first drive and by said second drive relative to a rotation axis (Rz) which is perpendicular to said first coordinate direction (y) and said second coordinate direction (x) at least partly or completely compensate for one another.