发明名称 |
PROTECTING AN INTERIOR OF A HOLLOW BODY WITH AN ALD COATING |
摘要 |
An apparatus and method for protecting an interior of a hollow body, where an inlet and exhaust manifold include a port assembly attachable to an opening of the hollow body is provided. The interior of the hollow body is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the opening into the interior of the hollow body, and excess gases is pumped via the opening and the port assembly out from the hollow body. |
申请公布号 |
EP3114249(A4) |
申请公布日期 |
2017.03.29 |
申请号 |
EP20140884857 |
申请日期 |
2014.03.03 |
申请人 |
Picosun Oy |
发明人 |
KOSTAMO, Juhana;MALINEN, Timo;SAMMELSELG, Väino;AARIK, Jaan;AARIK, Lauri |
分类号 |
C23C16/455;C23C16/04 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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