Optical measuring device and method

摘要

An optical measuring device is provided. An actuator of a reference mirror set drives a reference mirror to move back and forth at a scan velocity. A first light source module transmits a first light beam to an optical coupling module transmitting two parts of the first light beam respectively to an examinee object and the reference mirror set. The first light beam then is reflected by the examinee object and reference mirror set and then transmitted to the optical coupling module and the processing unit. The second light source module transmits a second light beam to the examinee object. Then the second light beam is reflected and then transmitted to the second sensing unit. The second sensing unit provides a sensing signal to the processing unit which accordingly provides a value of the relative velocity. The thickness is calculated according to the relative velocity and the scan velocity.

主权项

1. An optical measuring device, comprising:
a first light source module, providing a first light beam; a second light source module, providing a second light beam; a first sensing unit; a second sensing unit; a reference mirror set, having an actuator and a reference mirror, wherein the actuator drives the reference mirror to move back and forth at a scan velocity; an optical coupling module, transmitting the first light beam to the reference mirror set and an examinee object; and a processing unit; wherein the first light source module transmits the first light beam to the optical coupling module, the optical coupling module transmits one part of the first light beam to the examinee object, and the other one part of the first light beam to the reference mirror set, the one part of the first light beam is reflected by the surface of the examinee object and then transmitted to the optical coupling module, the first sensing unit and the processing unit in sequence, the other one part of the first light beam is reflected by the reference mirror set and then transmitted to the optical coupling module, the first sensing unit and the processing unit in sequence; wherein the second light source module transmits a second light beam to the examinee object, the second light beam is reflected by the surface of the examinee object and then transmitted to the second sensing unit, the second sensing unit accordingly provides a sensing signal to the processing unit, the processing unit provides a value of a relative velocity, calculates the thickness according to the scan velocity of the reference mirror set and the value of the relative velocity.