发明名称 |
THIN FILM TRANSISTOR, FABRICATION METHOD THEREOF, AND DISPLAY APPARATUS |
摘要 |
Various embodiments provide a thin film transistor (TFT), a fabrication method thereof, and a display apparatus including the TFT. A carbon nanotube layer (102) is formed over a substrate (100). The carbon nanotube layer (102) includes a first plurality of carbon nanotubes. A plurality of gaps (12) are formed through the carbon nanotube layer (102) to provide a first patterned carbon nanotube layer (102A). Carbon nanotube structures (112) each including a second plurality of carbon nanotubes are formed in the plurality of gaps (12). The carbon nanotube structures (112) have a carrier mobility different from the first patterned carbon nanotube layer (102A), thereby forming an active layer for forming active structures of the thin-film transistor. |
申请公布号 |
WO2017045137(A1) |
申请公布日期 |
2017.03.23 |
申请号 |
WO2015CN89660 |
申请日期 |
2015.09.15 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD. |
发明人 |
ZHANG, Shuai;CHAN, Yu Cheng |
分类号 |
H01L21/336;G02F1/1362;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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