APD Focal Plane Arrays with Backside Vias

摘要

An avalanche photodiode (APD) array with reduced cross talk comprises, in the illustrative embodiment, a 2D array of Geiger-mode APDs, wherein a via is formed through the backside (substrate) of each APD in the array.

主权项

1. An article comprising a first avalanche photodiode (APD), the first APD comprising:
a substrate layer having a first surface and a second surface, wherein, in operation, input light is received at the first surface of the substrate layer and propagates toward the second surface thereof; a buffer layer abutting the second surface of the substrate layer; a via extending from the first surface of the substrate layer and passing at least partially through the substrate layer towards the second surface thereof; and active device layers.