| 摘要 |
An imprint apparatus cures an imprint material supplied onto a substrate, by bringing a mold into contact with the imprint material and irradiating the imprint material with light. The apparatus includes a measurement device configured to measure a relative position between the substrate and the mold, a driver configured to drive at least one of the substrate and the mold so as to perform alignment between the substrate and the mold, a light irradiator configured to irradiate the imprint material with light so as to cure the imprint material, and a controller configured to control the driver so as to control the relative position based on information output from the measurement device, in a state in which the light irradiator irradiates the imprint material with the light. |
