| 摘要 |
A vacuum interface 500 comprising a housing having side walls defining an interior volume 514 of the housing, a first wall 501 of the housing defining an input orifice 520 to the interior volume and a second wall 503, opposite the first wall, defining an exit orifice from the interior volume, the interface further comprising a skimmer cone 518 integrally formed and extending inwardly from the second wall into the interior volume, the skimmer cone defining an entrance from the interior volume to the exit orifice wherein the vacuum interface is manufactured using microengineering techniques. The cone may be an electroplated metal. The pressure outside the first wall may be greater than the pressure in the interior volume which in turn may be greater than the pressure outside the second wall. A method of forming the skimmer cone is also described. |
