发明名称 MONOLITHIC MANIFOLD MASK AND SUBSTRATE CONCEPTS
摘要 Component-locating templates or masks for use with positioning fluid-flow components on monolithic ceramic substrates are provided, as well as techniques for the manufacture of such templates.
申请公布号 US2017057028(A1) 申请公布日期 2017.03.02
申请号 US201514843775 申请日期 2015.09.02
申请人 Lam Research Corporation 发明人 Kellogg Michael C.;Lee Andrew C.;Pena Christopher J.
分类号 B23P19/10 主分类号 B23P19/10
代理机构 代理人
主权项 1. An apparatus for locating parts to be assembled with a ceramic substrate, wherein the ceramic substrate has a plurality of first drop-holes formed in a first side of the ceramic substrate prior to sintering the ceramic substrate, the ceramic substrate has one or more reference features formed therein after the ceramic substrate has been sintered, the reference features define a substrate reference coordinate system, and each first drop-hole is associated with a port of one of a plurality of first fluid flow components, the apparatus comprising: a template including: one or more template-locating features configured to interface with the one or more reference features of the ceramic substrate so as to locate the template relative to the ceramic substrate when the template is laid against the first side of the ceramic substrate, andone or more component-locating features that are positioned at locations relative to a template reference coordinate system that are based, at least in part, on measured locations of the first drop-holes with respect to the substrate reference coordinate system, wherein the template-locating features define the template reference coordinate system and the template reference coordinate system is aligned with the substrate reference coordinate system when the template is laid against the first side of the ceramic substrate and the one or more template-locating features are interfaced with the one or more reference features.
地址 Fremont CA US