| 摘要 |
PURPOSE:To provide a small size, light weight, inexpensive, long service life, and highly reliable uniaxial angular velocity/ acceleration sensor having a quite simple mechanism. CONSTITUTION:A thin crystal plate 40 constituting a fork comprising two beams 42, 42' is sandwiched by two crystal plates 50, 60 keeping a slight gap. Electrodes 33, 43, 51, 61 and 33' 43', 51', 61' for detecting the displacement of two beams 42, 42' caused by uniaxial angular velocity/acceleration are formed on the two beams 42, 42' and the crystal plates 50, 60 on the opposite sides thus constituting a flexible fork type crystal unit for uniaxial angular speed/ acceleration sensor. |
