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发明名称
半導体装置
摘要
【課題】半導体基板への影響を抑制することが可能なヒューズ素子を有する半導体装置を提供する。【解決手段】半導体装置は、半導体基板の主表面に設けられた、凸状態の第1の絶縁膜と、半導体基板上に形成され、凸状態の第1の絶縁膜の周囲を囲むように設けられた半導体基板の導電型と異なる導電型の第1の拡散層と、ヒューズ素子を構成する凸状態の第1の絶縁膜を跨ぐように形成された第1の導電層と、第1の導電層の上に設けられた第2の絶縁膜とを備える。【選択図】図39
申请公布号
JP2017045839(A)
申请公布日期
2017.03.02
申请号
JP20150166814
申请日期
2015.08.26
申请人
ルネサスエレクトロニクス株式会社
发明人
高橋 幸雄;松浦 仁
分类号
H01L21/82;H01L21/28;H01L21/3205;H01L21/768;H01L21/822;H01L23/522;H01L27/04;H01L29/06;H01L29/41;H01L29/739;H01L29/78
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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