发明名称 |
DETERMINING ONE OR MORE CHARACTERISTICS OF A PATTERN OF INTEREST ON A SPECIMEN |
摘要 |
Methods and systems for determining characteristic(s) of patterns of interest (POIs) are provided. One system is configured to acquire output of an inspection system generated at the POI instances without detecting defects at the POI instances. The output is then used to generate a selection of the POI instances. The system then acquires output from an output acquisition subsystem for the selected POI instances. The system also determines characteristic(s) of the POI using the output acquired from the output acquisition subsystem. |
申请公布号 |
WO2017035142(A1) |
申请公布日期 |
2017.03.02 |
申请号 |
WO2016US48199 |
申请日期 |
2016.08.23 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
LENNEK, Michael;PARK, Allen;DUFFY, Brian;KULKARNI, Ashok |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|