| 发明名称 |
PIEZORESISTIVE DETECTION RESONANT DEVICE IN PARTICULAR WITH LARGE VIBRATION AMPLITUDE |
| 摘要 |
Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part. |
| 申请公布号 |
US2017059420(A1) |
申请公布日期 |
2017.03.02 |
| 申请号 |
US201615248756 |
申请日期 |
2016.08.26 |
| 申请人 |
Commissariat a L'Energie Atomique et aux Energies Alternatives ;POLITECNICO DI MILANO |
发明人 |
REY Patrice;JOURDAN Guillaume;ROBERT Philippe;LANGFELDER Giacomo;LONGONI Antonio F.;DELLEA Stefano |
| 分类号 |
G01L1/18;G01C19/5607;G01P15/12 |
主分类号 |
G01L1/18 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. Piezoresistive detection resonant device comprising a substrate, a mobile part configured to move with respect the substrate, at least one suspension element suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection device also comprises at least one first spring connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the at least one first spring, said at least one first spring being configured to limit the deformation amplitude of the at least one gauge under a threshold elongation. |
| 地址 |
Paris FR |
