发明名称 検査装置
摘要 The present invention provides a detection device for detecting the detected bodies of different types and improving the operation efficiency to thereby improve the production rate of a detection process of the detected bodies. The detection device for detecting the detected bodies comprises a plurality of detection unit mechanisms for detecting the above detected bodies and detection positions of the detected bodies corresponding to the plurality of detection unit mechanisms, the plurality of detection unit mechanisms can be moved in the same direction, and the detection device exists in the direction.
申请公布号 JP6084426(B2) 申请公布日期 2017.02.22
申请号 JP20120228005 申请日期 2012.10.15
申请人 株式会社日本マイクロニクス 发明人 三浦 一佳;高木 一也;夏堀 公士
分类号 G01R31/28;G02F1/13 主分类号 G01R31/28
代理机构 代理人
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