摘要 |
In at least one opening of a plurality of openings 10a and 10b, the following inequality is satisfied: x ‰¤ 1 2 ‹ t ‹ kx / ky where x represents a minimum distance in a horizontal direction between an end of the one opening and an end of a submount 8, and t represents a thickness of the submount, and
in at least one of the other openings different from the one opening, the following inequality is satisfied: x > 1 2 ‹ t ‹ kx / ky . |