| 摘要 |
The present embodiment relates to a charged-particle detector, etc. provided with a structure for effectively suppressing ion feedbacks under a low-vacuum environment. In order to capture the residual-gas ions, which are generated by collisions between the electrons output from a MCP unit 200 and residual-gas molecules, by a second electrode 400, which is electrically insulated from a first electrode 300, which is mainly for capturing electrons, the potential of the first electrode 300 is set to be higher than an output-side potential of the MCP unit 200, and, on the other hand, the potential of the second electrode 400 is set to be lower than the output-side potential of the MCP unit 200. As a result, the ion feedbacks to the MCP unit 200 are effectively suppressed. |
| 主权项 |
1. A charged-particle detector comprising:
a MCP unit having an input surface and an output surface opposed to the input surface and including one or more microchannel plate(s) disposed in space between the input surface and the output surface; a MCP input-side electrode disposed in a state in which at least part of the MCP input-side electrode contacts the input surface of the MCP unit, the MCP input-side electrode having an opening for exposing the input surface of the MCP unit; a MCP output-side electrode disposed in a state in which at least part of the MCP output-side electrode contacts the output surface of the MCP unit, the MCP output-side electrode having an opening for exposing the output surface of the MCP unit, the MCP output-side electrode configured to be set to a potential higher than that of the MCP input-side electrode; a first electrode disposed so as to sandwich the MCP output-side electrode together with the MCP input-side electrode, the first electrode having one or more openings, the first electrode configured so as to be set to a potential higher than that of the MCP output-side electrode; and a second electrode disposed so as to sandwich the first electrode together with the MCP output-side electrode, the second electrode configured so as to be set to a potential lower than that of the MCP output-side electrode. |
