ＳｉＯ２−ＴｉＯ２系ガラスの製造方法、ＳｉＯ２−ＴｉＯ２系ガラスからなる板状部材の製造方法、製造装置およびＳｉＯ２−ＴｉＯ２系ガラスの製造装置

摘要

A method for manufacturing an SiO 2 -TiO 2 based glass upon a target by a direct method, includes a first process of preheating the target and a second process of growing an SiO 2 -TiO 2 based glass ingot to a predetermined length upon the target which has been preheated, wherein the target is heated in the first process such that, in the second process, the temperature of growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature.