POLYSILANE PROCESSING AND USE

摘要

Producing a custom-made halogenated polysilane mixture for silicon production comprises either processing (e.g. hydrogenating or methylating) a chemically or plasmachemically generated halogenated polysilane mixture in the gas or liquid phase, either directly or after separation into high-purity fractions in a distillation column, or controlling the composition of a plasmachemically generated polysilane mixture by controlling the plasma reactor and mass flows.