STRAIN RESISTANCE ELEMENT, PRESSURE SENSOR, STRAIN GAUGE, ACCELERATION SENSOR, AND ANGULAR VELOCITY SENSOR

摘要

Provided is a strain resistance element having a large gauge factor and high detection sensitivity. The present invention is provided with: a substrate (an SOI substrate 5 including a Si substrate 1, a SiO2 layer 2, a surface Si film 3, and a SiO2 layer 4); and a strain resistance film 8 formed on a surface of the substrate, wherein the strain resistance film 8 is formed of a film of graphene or a transition metal dichalcogenide having a single-atom layer thickness or a multi-atom layer thickness. A pressure sensor, a strain gauge, an acceleration sensor, an angular velocity sensor, etc. can be manufactured by using the strain resistance element.