Real Time Diagnostics For Flow Controller Systems and Methods

摘要

A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.

主权项

1. A device, comprising:
a primary sensor and a secondary sensor located along a flow path within a flow device; the primary sensor and the second sensor configured to generate a signal that is indicative of a flow rate of material through the flow path; an outside sensor located outside the flow device to measure the flow of material received from the flow device; and the flow device configured to compare a signal from the outside sensor with the signal from the primary or secondary sensor to determine that at least one of the primary or secondary sensor is malfunctioning.