发明名称 角速度センサ
摘要 An angular velocity sensor comprising: a drive circuit to generate a drive signal; a vibrating weight; a vibrating unit to vibrate the vibrating weight along a first axis and a second axis according to the drive signal; an output unit to output a signal based on Coriolis force that occurs corresponding to angular velocity and vibration of the vibrating weight; a detection circuit to detect the angular velocity from the signal based on the Coriolis force; a first vibration attenuating unit to electrically consume kinetic energy of the vibrating weight is provided.
申请公布号 JP6067102(B2) 申请公布日期 2017.01.25
申请号 JP20150508013 申请日期 2014.03.07
申请人 旭化成株式会社 发明人 加藤 静一
分类号 G01C19/5776;H01L41/04;H01L41/053;H01L41/113 主分类号 G01C19/5776
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