发明名称 光学的検査システムの製造方法
摘要 The present invention includes an exposure chamber configured to contain a passivating gas having a selected hydrogen concentration, the exposure chamber further configured to contain at least one NLO crystal for exposure to the passivating gas within the chamber, a passivating gas source fluidically connected to the exposure chamber, the passivating gas source configured to supply passivating gas to an interior portion of the exposure chamber, and a substrate configured to hold the NLO crystal within the chamber, the substrate further configured to maintain a temperature of the NLO crystal at or near a selected temperature, the selected temperature being below a melting temperature of the NLO crystal.
申请公布号 JP6062521(B2) 申请公布日期 2017.01.18
申请号 JP20150206996 申请日期 2015.10.21
申请人 ケーエルエー−テンカー コーポレイション 发明人 チュアン ユン−ホ;ドリビンスキー ウラジミール
分类号 G01N21/956;G01N21/33;G02F1/37 主分类号 G01N21/956
代理机构 代理人
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