发明名称 |
SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY |
摘要 |
A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration. |
申请公布号 |
EP3117023(A1) |
申请公布日期 |
2017.01.18 |
申请号 |
EP20150760881 |
申请日期 |
2015.02.11 |
申请人 |
MKS Instruments, Inc. |
发明人 |
DING, Junhua;L'BASSI, Michael;LEE, Tseng-Chung |
分类号 |
C23C16/455;C23C16/448;C23C16/52 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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