发明名称 THIN-FILM-TRANSISTOR, THIN-FILM-TRANSISTOR ARRAY SUBSTRATE, FABRICATING METHODS THEREOF, AND DISPLAY PANEL
摘要 A TFT, a related TFT array substrate, fabricating methods thereof, a display panel and a display device containing the same are provided. A method for fabricating a TFT is provided, the method comprising: forming an initial conductive layer on a base substrate (01); performing an oxidization process to partially oxidize the initial conductive layer to form an oxidized insulating sub-layer (15) and a non-oxidized conductive sub-layer(10); and forming an active layer(19), a source electrode (20) and a drain electrode (21) over the oxidized insulating sub-layer (15).
申请公布号 WO2017004939(A1) 申请公布日期 2017.01.12
申请号 WO2015CN96953 申请日期 2015.12.10
申请人 BOE TECHNOLOGY GROUP CO., LTD.;SOUTH CHINA UNIVERSITY OF TECHNOLOGY 发明人 YUAN, Guangcai;YAN, Liangchen;XU, Xiaoguang;WANG, Lei;PENG, Junbiao;LAN, Linfeng
分类号 H01L21/34;H01L21/44;H01L21/77;H01L27/12;H01L29/423;H01L29/786 主分类号 H01L21/34
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