发明名称 |
THIN-FILM-TRANSISTOR, THIN-FILM-TRANSISTOR ARRAY SUBSTRATE, FABRICATING METHODS THEREOF, AND DISPLAY PANEL |
摘要 |
A TFT, a related TFT array substrate, fabricating methods thereof, a display panel and a display device containing the same are provided. A method for fabricating a TFT is provided, the method comprising: forming an initial conductive layer on a base substrate (01); performing an oxidization process to partially oxidize the initial conductive layer to form an oxidized insulating sub-layer (15) and a non-oxidized conductive sub-layer(10); and forming an active layer(19), a source electrode (20) and a drain electrode (21) over the oxidized insulating sub-layer (15). |
申请公布号 |
WO2017004939(A1) |
申请公布日期 |
2017.01.12 |
申请号 |
WO2015CN96953 |
申请日期 |
2015.12.10 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD.;SOUTH CHINA UNIVERSITY OF TECHNOLOGY |
发明人 |
YUAN, Guangcai;YAN, Liangchen;XU, Xiaoguang;WANG, Lei;PENG, Junbiao;LAN, Linfeng |
分类号 |
H01L21/34;H01L21/44;H01L21/77;H01L27/12;H01L29/423;H01L29/786 |
主分类号 |
H01L21/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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