| 摘要 |
PROBLEM TO BE SOLVED: To provide a dry type fingerprint cleaning device capable of removing a pollutant including a fingerprint formed on a surface of a cleaning object substrate, by combinedly using physical cleaning of using an ultrasonic wave and a cleaning towel and cleaning of using plasma.SOLUTION: A dry type fingerprint cleaning device 100 comprises a substrate carrying part 110 for carrying a cleaning object substrate 1 in one direction, an ultrasonic cleaning part 120 arranged on the upper side of an inlet of the substrate carrying part and cleaning an upper surface of the cleaning object substrate carried by the substrate carrying part by using an ultrasonic wave, a cleaning liquid cleaning part 130 adjacently provided in the ultrasonic cleaning part and rubbing and cleaning an upper surface of the cleaning object substrate by a cleaning towel 136 of applying a cleaning liquid and a plasma cleaning part 140 adjacently provided in the cleaning liquid cleaning part and cleaning by injecting plasma into the upper surface of the cleaning object substrate.SELECTED DRAWING: Figure 1 |
