发明名称 半導体装置
摘要 This invention provides a semiconductor device having high operation performance and high reliability. An LDD region 707 overlapping with a gate wiring is arranged in an n-channel TFT 802 forming a driving circuit, and a TFT structure highly resistant to hot carrier injection is achieved. LDD regions 717, 718, 719 and 720 not overlapping with a gate wiring are arranged in an n-channel TFT 804 forming a pixel unit. As a result, a TFT structure having a small OFF current value is achieved. In this instance, an element belonging to the Group 15 of the Periodic Table exists in a higher concentration in the LDD region 707 than in the LDD regions 717, 718, 719 and 720. <IMAGE>
申请公布号 JP6060119(B2) 申请公布日期 2017.01.11
申请号 JP20140167445 申请日期 2014.08.20
申请人 株式会社半導体エネルギー研究所 发明人 山崎 舜平;村上 智史;小山 潤;田中 幸夫;北角 英人;大沼 英人
分类号 G09F9/30;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L27/32;H01L29/786;H01L51/50;H05B33/12 主分类号 G09F9/30
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