| 摘要 |
In accordance with the aspects of the present disclosure, a method and apparatus is disclosed for three-dimensional imaging interferometric microscopy (IIM), which can use at least two wavelengths to image a three-dimensional object. The apparatus can include a first, a second, and a third optical system. The first optical system is disposed to provide a substantially coherent illumination to the 3D object, wherein the illumination is characterized by a plurality of wavelengths. The second optical system includes an optical image recording device and one or more additional optical components characterized by a numerical aperture NA. The third optical system provides interferometric reintroduction of a portion of the coherent illumination as a reference beam into the second optical system. An image recording device records each sub-image formed as a result of interference between the illumination that is scattered by the 3D object and the reference beam. |
| 主权项 |
1. A method for imaging a 3D object immersed in a medium of index of refraction nmed comprising:
providing a first optical system disposed to provide a substantially coherent illumination to the 3D object, wherein the illumination is characterized by a plurality of wavelengths λj, j=1, 2, . . . m, with λj+1<λj, wherein the plurality of wavelengths span a wavelength range of Δλ=λ1−λm; at each λj the illumination is characterized by a center position, a radius of curvature, a uniform-intensity illumination diameter at a plane of the 3D object, and a wavevector wherein the wavevector is disposed at one of a plurality of incident wavevectors from about 0 to about 2πnmed/λj, with respect to a longitudinal axis of the 3D object and at a plurality of azimuth angles spanning about 0 to 2π; providing a second optical system comprising an optical image recording device and one or more additional optical components with a numerical aperture NA, the second optical system defining an optical axis, wherein the optical recording device is operable to collect at least a portion of the Illumination from the first optical system scattered from the 3D object, wherein the optical axis of the second optical system is disposed at one of a plurality of angles between 0 and π/2 with respect to the longitudinal axis of the 3D object and at a plurality of azimuth angles spanning about 0 to 2π, wherein a field-of-view of the second optical system is within a spatial extent of the uniform-intensity illumination provided by the first optical system; providing a third optical system disposed in an optical path of the first optical system to provide interferometric reintroduction of a portion of the coherent illumination at each λj as a reference beam into the second optical system, wherein each of an amplitude, a phase, a radius of curvature, a path length, and an angle of incidence of the reference beam is adjustable such that a reference illumination suitable for interfering with a portion of the illumination scattered by the 3D object and collected by the second optical system is present at an input of the optical image recording device; recording a plurality of sub-images of the 3D object at the optical image recording device, one at each λj, wherein each sub-image is formed as a result of interference between scattering resulting from the coherent illumination of the 3D object and the reference beam; adjusting the first, the second and the third optical systems to collect a plurality of sub-images corresponding to the plurality of wavelengths, to a plurality of off-axis illumination conditions, and additionally to a plurality of directions of the optical axis of the second optical system with respect to the longitudinal axis of the 3D object; and combining the plurality of sub-images into a separate composite images of the 3D object. |
