Signal distribution in integrated circuit using optical through silicon via

摘要

An optical through silicon via is formed in a silicon substrate of an integrated circuit. A photo detector is formed within the integrated circuit and is optically coupled to a first side of the optical through silicon via. A light generating source optically coupled to a second side of the optical through silicon via is provided. The photo detector is configured to receive a light, generated by the light generating source, propagating through the optical through silicon via. The light, generated by the light generating source, is controlled by a signal generated by a signal generating source.

主权项

1. An apparatus comprising:
a signal generating source; a silicon substrate of an integrated circuit comprising at least one optical through silicon via, wherein the optical through silicon via comprises a nitride layer as an optical transmission medium, and wherein the optical through silicon via is formed by etching the nitride layer to recess a top surface of the nitride layer to below a top surface of the silicon substrate thereby forming a trench, and forming a silicon epilayer over a top surface of a remainder of the nitride layer and within the trench; a photo detector formed within the integrated circuit and optically coupled to a first side of the at least one optical through silicon via; a set of electrical elements coupled to the photo detector; and a light generating source optically coupled to a second side of the optical through silicon via; wherein the photo detector is operative to receive a light, generated by the light generating source, propagating through the optical through silicon via, and wherein the light, generated by the light generating source, is an optical signal controlled by a signal generated by the signal generating source; wherein the photo detector is further operative to convert the optical signal to an electrical signal, and wherein the electrical signal is distributed to the set of electrical elements.