ABRASIVE PARTICLES, POLISHING SLURRY AND METHOD OF FABRICATING ABRASIVE PARTICLES

摘要

The present disclosure relates to abrasive particles, a polishing slurry and a fabricating method of the abrasive particles. The fabricating method of abrasive particles in accordance with an exemplary embodiment of the present disclosure includes preparing a precursor solution in which a first precursor is mixed with a second precursor that is different from the first precursor, preparing a basic solution, mixing the basic solution with the precursor solution and_forming a precipitate, and washing abrasive particles synthesized by precipitation.

主权项

1. A method of fabricating abrasive particles, the method comprising:
preparing a precursor solution in which a first precursor is mixed with a second precursor that is different from the first precursor; preparing a basic solution; mixing the basic solution with the precursor solution and forming a precipitate; and washing abrasive particles synthesized by precipitation.