| 发明名称 |
EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL |
| 摘要 |
An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and a support for the distribution pipe, wherein the support is connectable to a first drive or includes the first drive, wherein the first drive is configured for a translational movement of the support and the distribution pipe. |
| 申请公布号 |
US2017005297(A1) |
申请公布日期 |
2017.01.05 |
| 申请号 |
US201315100282 |
申请日期 |
2013.12.10 |
| 申请人 |
BANGERT Stefan;SCHÜßLER Uwe;DIEGUEZ-CAMPO Jose Manuel;HAAS Dieter |
发明人 |
BANGERT Stefan;SCHÜßLER Uwe;DIEGUEZ-CAMPO Jose Manuel;HAAS Dieter |
| 分类号 |
H01L51/56;H01L51/00;C23C14/50;C23C14/04;C23C14/24 |
主分类号 |
H01L51/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An evaporation source for organic material, comprising:
an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and a support for the distribution pipe, wherein the support is connectable to a first drive or includes the first drive, wherein the first drive is configured for a translational movement of the support and the distribution pipe. |
| 地址 |
Steinau DE |
