| 发明名称 |
Vacuum apparatus using a matching box, and vacuum processing method using the same |
| 摘要 |
The matching box (2) comprises variable inductor including main winding and control winding that are magnetically coupled through the core. The impedance of the main winding is controlled based on the magnitude of direct current flowing through control winding. Independent claims are also included for the following: (1) vacuum apparatus; and (2) vacuum processing method. |
| 申请公布号 |
EP1398819(B1) |
申请公布日期 |
2016.11.09 |
| 申请号 |
EP20030020603 |
申请日期 |
2003.09.10 |
| 申请人 |
ULVAC, INC. |
发明人 |
YAJIMA, TARO;AKAISHI, MINORU;HORISHITA, YOSHIKUNI |
| 分类号 |
G21K1/00;H01J37/32;C23C14/40;C23C14/46;C23C16/00;G21K5/04;H01F29/14;H01J27/16;H01J37/08;H01J37/24;H01L21/3065;H03H7/40;H05H1/36;H05H1/46 |
主分类号 |
G21K1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
