发明名称 |
PHOTOSENSITIVE, DEVELOPER-SOLUBLE BOTTOM ANTI-REFLECTIVE COATING MATERIAL |
摘要 |
Photosensitive, developer-soluble bottom anti-reflective coatings are described. Compositions and methods of forming the same are also disclosed along with resulting microelectronic structures. The anti-reflective compositions comprise a multi-functional epoxy compound having multiple epoxy moieties pendant therefrom and one or more crosslinkable chromophores bonded thereto. The compounds are dispersed or dissolved in a solvent system with a vinyl ether crosslinker and can be used to create crosslinkable and de-crosslinkable coatings for microelectronics fabrication. |
申请公布号 |
EP2841513(A4) |
申请公布日期 |
2016.10.19 |
申请号 |
EP20130781341 |
申请日期 |
2013.04.22 |
申请人 |
BREWER SCIENCE, INC. |
发明人 |
LOWES, JOYCE;DAI, JINHUA;GUERRERO, ALICE |
分类号 |
G03F7/09;C09D163/00;G02B1/11 |
主分类号 |
G03F7/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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