发明名称 金属組成物及びその製法
摘要 The present invention relates to a process for forming metal-containing films by applying a photosensitive metal-containing composition on a substrate, drying the photosensitive metal-containing composition, exposing the photosensitive metal-containing composition to a source of actinic radiation and applying a post-treatment to the metal-containing composition. The process also includes exposing the photosensitive metal-containing composition to a source of actinic radiation through a mask or mold and developing the unexposed portion of the composition. Another embodiment of the invention is a metal-containing film, three-dimensional object or article formed by the process. The invention is useful in producing a directly patterned metal-containing film and a microdevice.
申请公布号 JP6004649(B2) 申请公布日期 2016.10.12
申请号 JP20110522047 申请日期 2009.06.27
申请人 プライオグ リミテッド ライアビリティ カンパニーPRYOG,LLC 发明人 マリク マンガーラ;シュワブ ジョセフ ジェー
分类号 C23C18/06;C08F20/06;C09D4/00;C09D4/02;C09D5/00;C09D7/12;C23C18/14;G03F7/004;G03F7/027;G03F7/40 主分类号 C23C18/06
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