发明名称 載置用部材およびその製造方法
摘要 A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).
申请公布号 JP6001675(B2) 申请公布日期 2016.10.05
申请号 JP20140550122 申请日期 2013.11.14
申请人 京セラ株式会社 发明人 堀内 雅彦
分类号 H01L21/683;G03F7/20 主分类号 H01L21/683
代理机构 代理人
主权项
地址
您可能感兴趣的专利