发明名称 ETCHANT COMPOSITION AND MANUFACTURING METHOD OF AN ARRAY FOR LIQUID CRYSTAL DISPLAY
摘要 The present invention relates to an etching solution composition and a method for producing an array substrate for liquid crystal display devices. According to the present invention, the etching solution composition contains precious metal compounds and thus creates catalytic effects. Thus, it is possible to integrally etch, via a wet-type etching process along with an upper metal wire, both impurity-included amorphous silicone layers and amorphous silicone which were once etched via a conventional dry-type method.
申请公布号 KR20160109569(A) 申请公布日期 2016.09.21
申请号 KR20150034253 申请日期 2015.03.12
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 SHIM, KYUNG BO;KIM, TAE WAN;AN, KI HUN
分类号 C09K13/06;C09K13/08;C23F1/18;H01L21/306 主分类号 C09K13/06
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