发明名称 半導体装置
摘要 A semiconductor device according to the present invention includes: a through via formed to penetrate a semiconductor substrate; first and second buffer circuits; a wiring forming layer formed in an upper layer of the semiconductor substrate; a connecting wiring portion formed in an upper portion of the through via assuming that a direction from the semiconductor substrate to the wiring forming layer is an upward direction, the connecting wiring portion being formed on a chip inner end face that faces the upper portion of the semiconductor substrate at an end face of the through via; a first path connecting the first buffer circuit and the through via; and a second path connecting the second buffer circuit and the through via. The first path and the second path are electrically connected through the connecting wiring portion.
申请公布号 JP5980556(B2) 申请公布日期 2016.08.31
申请号 JP20120103066 申请日期 2012.04.27
申请人 ルネサスエレクトロニクス株式会社 发明人 高柳 浩二
分类号 H01L21/822;H01L21/3205;H01L21/66;H01L21/768;H01L23/522;H01L25/065;H01L25/07;H01L25/18;H01L27/04 主分类号 H01L21/822
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