A NANO-SENSITIVE FOURIER-DOMAIN OPTICAL COHERENCE TOMOGRAPHY INSPECTION SYSTEM

摘要

An OCT imaging system (100) comprising a radiation emitter (SLD), a radiation receiver CCD), an interferometer (FC, PC, X-Scan, Y-Scan), a controller (COMP) which controls the emitter and processes received radiation data according to OCT to provide an output image. The controller (COMP) forms a spectrum of spatial frequencies along the depth direction. It calculates from the spectrum local spectra of spatial frequencies or periods along the depth direction for individual volume elements along the depth direction. It translates the local spectra of spatial frequencies or periods along the depth direction into the OCT image domain. It maps the local spectra into the volume elements to provide sensitivity on the nano-scale whereas the volume elements are in the micro-scale. The controller calculates information parameters from the translated and mapped local spectra. Thus the system (100) achieves nano-scale sensitivity although the volume elements are at the micro-scale.