TEMPERATURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a temperature sensor with which it is possible to obtain high heat collection property when measuring the temperature of an object to be measured in contact therewith, and to perform more accurate temperature measurement.SOLUTION: A temperature sensor comprises: an insulating film 2; a thin-film thermistor part 3 patterned with a thermistor material on the surface of the insulating film; one pair of comb-shaped electrodes 4 having a plurality of comb parts 4a on top of the thin-film thermistor part and patterned facing each other; one pair of pattern electrodes 5 connected to the one pair of comb-shaped electrodes and patterned on the surface of the insulating film; and a heat-collecting film 7 patterned with a material whose heat conductivity is higher than that of the insulating film directly beneath the thin-film thermistor part that is the reverse side of the insulating film.SELECTED DRAWING: Figure 1