| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding apparatus for grinding a plate-like workpiece by ultrasonic vibration of a rotating abrasive grindstone, that prevents the ultrasonic vibration generated by ultrasonic vibrators from propagating to a grinding spindle and an apparatus body.SOLUTION: Ultrasonic vibrators 72 are mounted on an undersurface of a bag body 71 and abrasive grindstones 73 are adhered and fixed to the ultrasonic vibrators 72, and in order to carry out grinding, the ultrasonic vibrators 72 are vibrated in a state that the bag body 71 is supplied with fluid to be expanded. Because the ultrasonic vibration is blocked by the bag body 71, almost none vibration is propagated to a grinding spindle 4, thereby the ultrasonic vibration is efficiently propagated to the abrasive grindstones 73. Accordingly, grinding is made possible of a grinding material that is hard to be ground. |
