| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid processing apparatus capable of inhibiting static electrification of a process liquid flowing in a pipeline with an easy method.SOLUTION: A liquid processing apparatus supplies a process liquid to a substrate W to perform the liquid processing. A liquid processing part of the liquid processing apparatus is stored in a housing 11 at least an inner surface of which is formed by an insulator, and conductive pipelines 52, 53 provided for supplying the process liquid to the substrate in the liquid processing part are connected with external pipelines 521, 531 through a joint 71 which is provided on a wall part of the housing 11 and is formed by an insulator. The conductive pipelines 52, 53 are electrically connected with a ground conductor 51 which is grounded at the exterior of the housing 11 penetrating through the housing 11. |
