| 摘要 |
PROBLEM TO BE SOLVED: To prevent stripe-like dirt generated on a substrate when a claw part on which the substrate is located enters into processing liquid from outside of the processing liquid, and reduce consumption of the processing liquid.SOLUTION: A dry processing part 3 comprises: a processing tank 5; and an elevation part 6. The elevation part elevates a substrate between a liquid processing position at which a claw part 61 supporting a substrate 9 under an upright state from below is arranged near a bottom of the processing tank, and a delivery position at which the claw part is arranged near a top part of the processing tank. Furthermore, a transfer part 211 elevating a substrate holding a pair of support members 214 between a transportation position above the processing tank and the delivery position is provided. A distance between inner faces of the processing tak at a center position in an upward and downward direction of the substrate at the liquid processing position is smaller than a value found by total of widths of both of the support members to a diameter of the substrate. When the substrate is transported from the transportation position to the delivery position, the substrate is located on the claw part positioned in the processing liquid, so as to prevent stripe-like dirt. Miniaturization of the processing tank also reduces consumption of the processing liquid. |
