发明名称 銅メタライズ配線セラミック基板及びその製造方法
摘要 The present invention pertains to a process for producing a ceramic copper-metallized wiring board, said process including: forming a film which comprises 150 to 250 zinc oxide needle crystals per μm2 on a ceramic base material by a wet method of immersing the ceramic base material in a zinc plating liquid, said zinc oxide needle crystals having a diameter of 20 to 100nm and a length of 120 to 280nm; heat-treating the resulting ceramic base material in the atmosphere at a temperature of 500 to lower than 900º; forming a copper deposit by electroless copper plating or copper electroplating; and subjecting the copper deposit to patterning with an etching resist to form a wiring pattern. According to the process, a ceramic copper-metallized wiring board which exhibit excellent adhesion and which is usable as a wiring board for a power module can be obtained.
申请公布号 JP5947401(B2) 申请公布日期 2016.07.06
申请号 JP20140550132 申请日期 2013.11.18
申请人 ニッコー株式会社;地方独立行政法人 大阪市立工業研究所 发明人 長瀬 歩美;亀井 寛;木谷 直樹;青木 盟;品川 勉
分类号 C23C18/18;C23C18/38;C23C28/00;C25D5/54;H05K3/18;H05K3/38 主分类号 C23C18/18
代理机构 代理人
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